Soft X-Ray Optics Using Metal Multilayer Mirrors

Ping Lee

doi:10.1117/12.966229

23 May 1984 Soft X-Ray Optics Using Metal Multilayer Mirrors

Ping Lee

Proceedings Volume 0464, Solid-State Optical Control Devices; (1984) https://doi.org/10.1117/12.966229
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

Recent advances in thin film fabrication techniques have made metal multilayer mirrors an important new addition in the field of soft x-ray diffraction optics. A metal multilayer is one dimensional periodic structure which consists of an alternating sequence of high/low atomic number elements evaporated or sputtered onto a substrate. Characterization of these devices have been carried out on a variety of x-ray sources, including synchrotron radiation, over a large range of parameters. Extensive modelling of the diffraction characteristics of multilayers has shown that the theory of optics of thin film gives good agreement between measured and calculated diffraction profiles. Application of metal multilayer mirrors as normal incidence x-ray collectors, monochromators and beam splitters is being explored.

Citation Download Citation

Ping Lee "Soft X-Ray Optics Using Metal Multilayer Mirrors", Proc. SPIE 0464, Solid-State Optical Control Devices, (23 May 1984); https://doi.org/10.1117/12.966229

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