Paper
23 May 2002 Design and fabrication of a micromirror array for autostereoscopic 3D displays
Jun Yan, Stephen T. Kowel, Hyoung J. Cho, Chong Hyuk Ahn
Author Affiliations +
Proceedings Volume 4660, Stereoscopic Displays and Virtual Reality Systems IX; (2002) https://doi.org/10.1117/12.468035
Event: Electronic Imaging, 2002, San Jose, California, United States
Abstract
We designed and fabricated the first, to the best of our knowledge, micromirror array for autostereoscopic 3D display systems. We conducted the optical and Micro-Electrical- Mechanical-System (MEMS) design concurrently, and fabricated several 20x20 micromirror arrays, with micromirror size of 460x460 microns. Both electrostatic and magnetic actuation methods were used to achieve deflection angles of +/- 0.8 degrees. We used these micromirror arrays with backlit transparencies to build a 2-view (left and right) autostereoscopic 3-D display system.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Yan, Stephen T. Kowel, Hyoung J. Cho, and Chong Hyuk Ahn "Design and fabrication of a micromirror array for autostereoscopic 3D displays", Proc. SPIE 4660, Stereoscopic Displays and Virtual Reality Systems IX, (23 May 2002); https://doi.org/10.1117/12.468035
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KEYWORDS
Micromirrors

3D displays

Microelectromechanical systems

Etching

Eye

Reactive ion etching

Optical fabrication

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