2D-image-based CD-SEM applications for thin film head metrology

Srinath Venkataram; Neeraj Khanna; Sanford Lewis; Gautam Khera

doi:10.1117/12.473416

16 July 2002 2D-image-based CD-SEM applications for thin film head metrology

Srinath Venkataram, Neeraj Khanna, Sanford Lewis, Gautam Khera

Proceedings Volume 4689, Metrology, Inspection, and Process Control for Microlithography XVI; (2002) https://doi.org/10.1117/12.473416
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

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Srinath Venkataram, Neeraj Khanna, Sanford Lewis, and Gautam Khera "2D-image-based CD-SEM applications for thin film head metrology", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); https://doi.org/10.1117/12.473416

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