Efficient and reliable design of microsystems

Dagmar Peters; Sven Rehfuss; Hilmar Bolte; Oliver Nuessen; Rainer Laur

doi:10.1117/12.462819

19 April 2002 Efficient and reliable design of microsystems

Dagmar Peters, Sven Rehfuss, Hilmar Bolte, Oliver Nuessen, Rainer Laur

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462819
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

The way of how an efficient and reliable design strategy for Microsystems should be set up is discussed and put into practice. Within this design strategy automatic design optimization plays a decisive role. The model based design optimization system MODOS is presented which has especially been developed for the development of Microsystems. Finally, the proposed design strategy is utilized to optimize a micro mechanical pressure sensor with integrated readout circuitry.

Citation Download Citation

Dagmar Peters, Sven Rehfuss, Hilmar Bolte, Oliver Nuessen, and Rainer Laur "Efficient and reliable design of microsystems", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462819

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