Paper
13 September 2002 Deep drilling of metals by femtosecond laser pulses
Guenter Kamlage, Boris N. Chichkov, Andreas Ostendorf, Hans Kurt Toenshoff
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Abstract
Fabrication of deep high-quality holes in different materials is required for many industrial applications. In this presentation we provide results of detailed investigations on deep drilling of metals by femtosecond laser pulses. We identify most important parameters which should be fulfilled for the fabrication of high-quality holes and efficient femtosecond laser ablation, discuss the role played by the laser-induced optical breakdown, debris, and laser pulse repetition rate.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guenter Kamlage, Boris N. Chichkov, Andreas Ostendorf, and Hans Kurt Toenshoff "Deep drilling of metals by femtosecond laser pulses", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482108
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Femtosecond phenomena

Laser drilling

Metals

Pulsed laser operation

Laser ablation

Laser optics

Laser processing

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