Fabrication of planar blazed grating using laser LIGA

Chi-Feng Chen; Rui-Ting Zheng; Bor-Hong Yao

doi:10.1117/12.482276

3 September 2002 Fabrication of planar blazed grating using laser LIGA

Chi-Feng Chen, Rui-Ting Zheng, Bor-Hong Yao

Proceedings Volume 4907, Optical Switching and Optical Interconnection II; (2002) https://doi.org/10.1117/12.482276
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China

Abstract

We study the design of planar micro-grating and propose a new approach to fabricate planar micro-grating. By the basic grating diffractive theory (rigorous coupled wave theory), suitable and optimized structure (within our manufacturing capabilities) of grating for our application is found. The fabrication of planar micro-grating is demonstrated by Laser LIGA technology, using the instrument of KrF (248 nm) excimer laser system. The micro-grating with the continuous smooth profile and the pitch 2.5 ?m is shown.

Citation Download Citation

Chi-Feng Chen, Rui-Ting Zheng, and Bor-Hong Yao "Fabrication of planar blazed grating using laser LIGA", Proc. SPIE 4907, Optical Switching and Optical Interconnection II, (3 September 2002); https://doi.org/10.1117/12.482276

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available