Detection of optical field by near-field scanning optical microscopy

Tiejun Xu; Jiying Xu; Jia Wang; Dong Pan; Liqun Sun; Qian Tian

doi:10.1117/12.483336

17 September 2002 Detection of optical field by near-field scanning optical microscopy

Tiejun Xu, Jiying Xu, Jia Wang, Dong Pan, Liqun Sun, Qian Tian

Proceedings Volume 4930, Advanced Optical Storage Technology; (2002) https://doi.org/10.1117/12.483336
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Based on theory and method of the near-field optics, optical resolution of near-field scanning optical microscopy (NSOM) is beyond the classical optical diffraction limit and down to tens of nanometer or even less. In this paper, a collection mode NSOM is built to detect and analyze local near-field distribution. The output optical field of a standard 1μm×1μm scale 2D grating has been detected. This NSOM system can also be used to study local near-field distribution of the focused spot of solid immerging lens (SIL) and the result can be directly used to evaluate SIL and compared with the calculation of its theoretical model and as a result, to improve the theoretical model.

Citation Download Citation

Tiejun Xu, Jiying Xu, Jia Wang, Dong Pan, Liqun Sun, and Qian Tian "Detection of optical field by near-field scanning optical microscopy", Proc. SPIE 4930, Advanced Optical Storage Technology, (17 September 2002); https://doi.org/10.1117/12.483336

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