Experimental evaluation of stopping power of high-energy ions from laser-produced plasma by a magnetic field

Gohta Niimi; Yoshifumi Ueno; Kentaro Nishigori; Tatsuya Aota; Hidehiko Yashiro; Toshihisa Tomie

doi:10.1117/12.483747

16 June 2003 Experimental evaluation of a stopping power of high-energy ions from a laser-produced plasma by a magnetic field

Gohta Niimi, Yoshifumi Ueno, Kentaro Nishigori, Tatsuya Aota, Hidehiko Yashiro, Toshihisa Tomie

Author Affiliations +

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.483747
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Magnetic field shield for laser produced plasma (LPP) had been investigated. The interaction between expanding LPP and magnetic field is not described by Lorentz force, but, may be described by magneto hydro dynamics. When a magnetic field strength of 0.6T was placed between LPP and a faraday cup, attainment ratio of plasma to a faraday cup was decrease to 20%. The attainment ratio was decreased from 0.4 to 0.25 with varying the distance between the plasma and the magnetic field from 10 mm to 70 mm. And, it was observed that plasma detoured around a magnetic field.

Citation Download Citation

Gohta Niimi, Yoshifumi Ueno, Kentaro Nishigori, Tatsuya Aota, Hidehiko Yashiro, and Toshihisa Tomie "Experimental evaluation of a stopping power of high-energy ions from a laser-produced plasma by a magnetic field", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.483747

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available