Performance of imide and methide onium PAGs in 193-nm resist formulations

Munirathna Padmanaban; Ralph R. Dammel; SangHo Lee; Woo-Kyu Kim; Takanori Kudo; Douglas S. McKenzie; Dalil Rahman

doi:10.1117/12.487738

12 June 2003 Performance of imide and methide onium PAGs in 193-nm resist formulations

Munirathna Padmanaban, Ralph R. Dammel, SangHo Lee, Woo-Kyu Kim, Takanori Kudo, Douglas S. McKenzie, Dalil Rahman

Proceedings Volume 5039, Advances in Resist Technology and Processing XX; (2003) https://doi.org/10.1117/12.487738
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

The performance of a new class of photoacid generators (PAGs) made from the onium salts of bis(perfluoroalkylsulfonyl)imide and tris(perfluoroalkylsulfonyl)methide anions were studied in 193nm formulations. The lithographic properties such as sensitivity, resolution, pattern profiles, footing, I-D bias and PEB sensitivity were investigated in methacrylate and COMA/methacrylate hybrid type matrix resins. In general the iodonium PAGs were about three times slower than the sulfonium PAGs. Methide and imide PAGs possessing similar fluoroalkylgroups showed comparable performance in terms of exposure latitude, I-D bias. And PEB sensitivity. Compared to the reference PAG, the profiles exhibited T-tops and sum. Among the new PAGs studied bis(perfluorobutanesulfonyl)imide exhibited close performance to that of the reference PAG except for the scum. Details on the exposure results of these PAGs in both methacrylate type and COMA/methacrylate hybrid type polymer based 193nm resist formulations are provided.

Citation Download Citation

Munirathna Padmanaban, Ralph R. Dammel, SangHo Lee, Woo-Kyu Kim, Takanori Kudo, Douglas S. McKenzie, and Dalil Rahman "Performance of imide and methide onium PAGs in 193-nm resist formulations", Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); https://doi.org/10.1117/12.487738

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available