Adaptive Shack-Hartmann sensor

Lars Seifert; Jan Liesener; Hans J. Tiziani

doi:10.1117/12.499543

30 May 2003 Adaptive Shack-Hartmann sensor

Lars Seifert, Jan Liesener, Hans J. Tiziani

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.499543
Event: Optical Metrology, 2003, Munich, Germany

Abstract

We present a new type of Shack-Hartmann sensor. Replacing the static microlens array in a Shack-Hartmann sensor by a liquid crystal display results in a greater measurement flexibility. The liquid-crystal display in the adaptive Shack-Hartmann Sensor is used for the generation of an array of Fresnel microlenses. The design parameters of the microlenses like focal length, number of lenses, position, and aperture size can be quickly adapted to solve difficult measurement tasks. Furthermore the adaptive Shack-Hartmann sensor allows a pre-correction of the hologram to the wave-front to take care of larger aberrations and to achieve a higher measurement accuracy. We compare the adaptive sensor with a conventional Shack-Hartmann sensor and discuss new strategies to determine the wave-front that are possible with this active system.

Citation Download Citation

Lars Seifert, Jan Liesener, and Hans J. Tiziani "Adaptive Shack-Hartmann sensor", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.499543

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