Form birefringent retardation plates in GaAs substrates: design, fabrication, and characterization

Maziar P. Nezhad; Chia-Ho Tsai; Lin Pang; Wataru Nakagawa; Guy Klemens; Yeshaiahu Fainman

doi:10.1117/12.506672

20 October 2003 Form birefringent retardation plates in GaAs substrates: design, fabrication, and characterization

Maziar P. Nezhad, Chia-Ho Tsai, Lin Pang, Wataru Nakagawa, Guy Klemens, Yeshaiahu Fainman

Proceedings Volume 5225, Nano- and Micro-Optics for Information Systems; (2003) https://doi.org/10.1117/12.506672
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We discuss various practical points in the design, fabrication and characterization of form birefringent retardation plates in GaAs. The role of the substrate in the device performance is presented, together with the importance of using anti-reflection coatings. Also, we discuss the specific case of metallic reflection gratings in GaAs substrates and the resulting enhanced retardation. Finally we present the results of thermal tuning of a nominally half-wave subwavelength retardation plate.

Citation Download Citation

Maziar P. Nezhad, Chia-Ho Tsai, Lin Pang, Wataru Nakagawa, Guy Klemens, and Yeshaiahu Fainman "Form birefringent retardation plates in GaAs substrates: design, fabrication, and characterization", Proc. SPIE 5225, Nano- and Micro-Optics for Information Systems, (20 October 2003); https://doi.org/10.1117/12.506672

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