High-resolution metrology of optical components by spectral interferometry

David Reolon; Gerald Brun; Karim Ben Houcine; Isabelle Verrier; Colette Veillas; Maxime Jacquot

doi:10.1117/12.513400

26 February 2004 High-resolution metrology of optical components by spectral interferometry

David Reolon, Gerald Brun, Karim Ben Houcine, Isabelle Verrier, Colette Veillas, Maxime Jacquot

Proceedings Volume 5252, Optical Fabrication, Testing, and Metrology; (2004) https://doi.org/10.1117/12.513400
Event: Optical Systems Design, 2003, St. Etienne, France

Abstract

In this paper we describe an interferometric process using a polychromatic light source and a spectroscopic detection system. This method is used for surface metrology or for bulk optical components characterisation (dispersion for example). As classical monochromatic interferometry, it consists in comparing a reference wave front with one issued from the component to be tested. However this measurement is assumed by determination of the spectral dispersion induced upon the various frequencies of the light source spectrum. The aim of this work is both dispersion measurements and characterisation of aspherical surfaces

Citation Download Citation

David Reolon, Gerald Brun, Karim Ben Houcine, Isabelle Verrier, Colette Veillas, and Maxime Jacquot "High-resolution metrology of optical components by spectral interferometry", Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); https://doi.org/10.1117/12.513400

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