Study on structural and optical properties of TiO2 thin films prepared by sol-gel process

Shuang Zhang; Caixia Liu; Zhiyong Zhao; Wei Dong; Chuanzhou Zhang; Xindong Zhang; Yong Gan; Hailin Xue; Weiyou Chen

doi:10.1117/12.520458

12 May 2004 Study on structural and optical properties of TiO2 thin films prepared by sol-gel process

Shuang Zhang, Caixia Liu, Zhiyong Zhao, Wei Dong, Chuanzhou Zhang, Xindong Zhang, Yong Gan, Hailin Xue, Weiyou Chen

Proceedings Volume 5280, Materials, Active Devices, and Optical Amplifiers; (2004) https://doi.org/10.1117/12.520458
Event: Asia-Pacific Optical and Wireless Communications, 2003, Wuhan, China

Abstract

TiO₂ thin films were prepared at various calcinations temperatures by sol-gel process and their structural and optical properties were examined. The influence of calcinations temperature on the structural properties of the prepared TiO₂ thin films was investigated by the X-ray diffraction (XRD) and atomic force microscope (AFM). The XRD results showed that TiO₂ thin film was transformed into the anatase phase at 350°C, and further into rutile phase at 850°C. The AFM results show quite a smooth surface and are in reasonably well agreement with the crystallite sizes estimated by XRD peak broadening. The influence of calcinations temperature on the optical properties of the prepared TiO₂ thin films was investigated by UV-Vis spectrum and variable angle incidence spectroscopic ellipsometer (VASE). The results showed the both anatase phase and rutile phase of the TiO₂ thin films prepared have good optical properties in UV region.

Citation Download Citation

Shuang Zhang, Caixia Liu, Zhiyong Zhao, Wei Dong, Chuanzhou Zhang, Xindong Zhang, Yong Gan, Hailin Xue, and Weiyou Chen "Study on structural and optical properties of TiO2 thin films prepared by sol-gel process", Proc. SPIE 5280, Materials, Active Devices, and Optical Amplifiers, (12 May 2004); https://doi.org/10.1117/12.520458

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