Optical beam induced current microscopy at DC and radio frequency

Fu-Jen Kao

doi:10.1117/12.528592

8 June 2004 Optical beam induced current microscopy at DC and radio frequency

Fu-Jen Kao

Proceedings Volume 5353, Semiconductor Photodetectors; (2004) https://doi.org/10.1117/12.528592
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

In this paper we introduce the concept and technique of optical beam induced current (OBIC) generation at radio frequencies. The method is combined with lateral raster scanning of a tightly focused spot so as to generate a mapping of high spatial resolution. We demonstrate experimentally that if a mode-locked laser is used to excite the sample then the frequency transfer function of the optically active device is readily obtained with at least 1 µm spatial resolution, in real time. In addition, with the help of an appropriate electronic arrangement, we demonstrate how to obtain pseudocolored OBIC images of the sample.

Citation Download Citation

Fu-Jen Kao "Optical beam induced current microscopy at DC and radio frequency", Proc. SPIE 5353, Semiconductor Photodetectors, (8 June 2004); https://doi.org/10.1117/12.528592

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