Magneto-optic spatial light modulator with one-step pattern formation

Jae-Hyuk Park; Jae-Kyeong Cho; Kazuhiro Nishimura; Hironaga Uchida; Mitsuteru Inoue

doi:10.1117/12.522912

25 June 2004 Magneto-optic spatial light modulator with one-step pattern formation

Jae-Hyuk Park, Jae-Kyeong Cho, Kazuhiro Nishimura, Hironaga Uchida, Mitsuteru Inoue

Proceedings Volume 5363, Emerging Optoelectronic Applications; (2004) https://doi.org/10.1117/12.522912
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

We demonstrated a magneto-optic spatial light modulator with one-step pattern formation of iron-garnet films on ion-milled substrates by LPE. The one-step pixel growth is based on the combination of a single-crystal epitaxial film growth (pixel area) by LPE and a impeded film growth (pixel gap area) on a substrate whose surface has been locally damaged and milled by ion bombardment before film deposition. This method overcomes the disadvantages associated with groove etching of the conventional MOSLM. The fabricated prototype MOSLM is switched by applying driving currents of 40 mA for the bottom conductor line and 80 mA for the top conductor line under external bias field of 20 Oe, which is over 2 times smaller than that of the conventional MOSLM. These results strongly suggest that the novel MOSLM can provide higher resolution, simpler fabrication process, more compact systems and lower driving current. Also, the selective-area LPE method offers new possibilities for the fabrication of integrated magneto-optic light switch arrays, magnetic waveguides and similar devices.

Citation Download Citation

Jae-Hyuk Park, Jae-Kyeong Cho, Kazuhiro Nishimura, Hironaga Uchida, and Mitsuteru Inoue "Magneto-optic spatial light modulator with one-step pattern formation", Proc. SPIE 5363, Emerging Optoelectronic Applications, (25 June 2004); https://doi.org/10.1117/12.522912

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