Joseph Pankert, Klaus Bergmann, Juergen Klein, Willi Neff, Oliver Rosier, Stefan Seiwert, Christopher Smith, Sven Probst, Dominik Vaudrevange, Guido Siemons, Rolf Apetz, Jeroen Jonkers, Michael Loeken, Guenther Derra, Thomas Kruecken, Peter Zink
Joseph Pankert,1 Klaus Bergmann,2 Juergen Klein,2 Willi Neff,2 Oliver Rosier,2 Stefan Seiwert,2 Christopher Smith,2 Sven Probst,3 Dominik Vaudrevange,1 Guido Siemons,1 Rolf Apetz,1 Jeroen Jonkers,1 Michael Loeken,1 Guenther Derra,4 Thomas Kruecken,4 Peter Zink4
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The paper describes progress of the Philips’ hollow cathode triggered (HCT) gas discharge EUV source. The program
has been focussed on three major areas: (1) Studying the basic physics of ignition, pinch formation and EUV
generation. The paper reports on progress in this area and particularly describes the underlying atomic physics both for
Xe and Sn. (2) Discharge based on Sn. Results on overall efficiency more than 5 times the Xe efficiency are reported as
well as high frequency operation up to 6.5 kHz. This system shows all the necessary ingredients for scaling to
production power levels. (3) Integration of the Xe source in an alpha tool. Results on integration issues like electrode
life time, collector life time and dose control will be presented.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Joseph Pankert, Klaus Bergmann, Juergen Klein, Willi Neff, Oliver Rosier, Stefan Seiwert, Christopher Smith, Sven Probst, Dominik Vaudrevange, Guido Siemons, Rolf Apetz, Jeroen Jonkers, Michael Loeken, Guenther Derra, Thomas Kruecken, Peter Zink, "Status of Philips' extreme UV source," Proc. SPIE 5374, Emerging Lithographic Technologies VIII, (20 May 2004); https://doi.org/10.1117/12.538041