Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies

Gerold Schropfer; Mark McNie; Mark da Silva; Rhodri Davies; Alexandra Rickard; Francois-Xavier Musalem

doi:10.1117/12.544971

16 August 2004 Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies

Gerold Schropfer, Mark McNie, Mark da Silva, Rhodri Davies, Alexandra Rickard, Francois-Xavier Musalem

Proceedings Volume 5455, MEMS, MOEMS, and Micromachining; (2004) https://doi.org/10.1117/12.544971
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

Designing manufacturable MEMS devices requires a strong link between design and process engineers. Establishing systematic design principles through a common CAD framework facilitates this. A methodology for MEMS Design for Manufacturing (DFM) is presented that focuses on solid process and design qualification through systematic parametric modeling and testing, from initial development of specifications to volume manufacturing. This strategy has been applied to two MEMS fabrication processes, including CMOS-compatible SOI micromachining and metal-nitride surface micromachining. Case studies of designed, simulated, fabricated and characterized test structures demonstrate the methodology and benefits of the outlined DFM approach - including extraction of material properties and process capabilities enabling a prediction of fabricated device performance distribution. The overall result is a MEMS product design framework that incorporates a top-down design methodology with parametric re-usable libraries of MEMS, IC and relevant system components capable of allowing to design within a specific process (via a process design kit) to enable virtual manufacturing.

Citation Download Citation

Gerold Schropfer, Mark McNie, Mark da Silva, Rhodri Davies, Alexandra Rickard, and Francois-Xavier Musalem "Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); https://doi.org/10.1117/12.544971

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