Signal modeling for modern interference microscopes

Peter J. de Groot; Xavier Colonna de Lega

doi:10.1117/12.546226

10 September 2004 Signal modeling for modern interference microscopes

Peter J. de Groot, Xavier Colonna de Lega

Proceedings Volume 5457, Optical Metrology in Production Engineering; (2004) https://doi.org/10.1117/12.546226
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

A theoretical model of the optical system of an interference microscope includes both geometrical and spectral contributions to fringe contrast localization. An incoherent superposition of interference patterns over a range of wavelengths and pupil-plane coordinates predicts the frequency-domain portrait of the interference phenomenon. An inverse Fourier transform then provides simulated signals that correlate very closely to experimental data. The model is particularly useful for signal prediction, algorithm testing, uncertainty analysis and system characterization, including modern applications in thin film analysis and stroboscopic interferometry.

Citation Download Citation

Peter J. de Groot and Xavier Colonna de Lega "Signal modeling for modern interference microscopes", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); https://doi.org/10.1117/12.546226

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