Realization of optical pickup head by using stacked silicon-based micro-optical system

Chih Ming Wang; Hsiao-Chin Lan; Jenq Yang Chang; Chien Chieh Lee

doi:10.1117/12.559213

22 October 2004 Realization of optical pickup head by using stacked silicon-based micro-optical system

Chih Ming Wang, Hsiao-Chin Lan, Jenq Yang Chang, Chien Chieh Lee

Proceedings Volume 5524, Novel Optical Systems Design and Optimization VII; (2004) https://doi.org/10.1117/12.559213
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45 degrees silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1um.

Citation Download Citation

Chih Ming Wang, Hsiao-Chin Lan, Jenq Yang Chang, and Chien Chieh Lee "Realization of optical pickup head by using stacked silicon-based micro-optical system", Proc. SPIE 5524, Novel Optical Systems Design and Optimization VII, (22 October 2004); https://doi.org/10.1117/12.559213

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KEYWORDS

Silicon

Head

Optical components

Semiconductor lasers

Free space optics

Reflectors

Holographic optical elements

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