Synchrotron x-ray study of multilayers in Laue geometry

Hyon Chol Kang; Gregory B. Stephenson; Chian Liu; Ray Conley; Albert T. Macrander; Jorg Maser; Sasa Bajt; Henry N. Chapman

doi:10.1117/12.560173

3 November 2004 Synchrotron x-ray study of multilayers in Laue geometry

Hyon Chol Kang, Gregory B. Stephenson, Chian Liu, Ray Conley, Albert T. Macrander, Jorg Maser, Sasa Bajt, Henry N. Chapman

Author Affiliations +

Proceedings Volume 5537, X-Ray Sources and Optics; (2004) https://doi.org/10.1117/12.560173
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Zone plates with depth to zone-width ratios as large as 100 are needed for focusing of hard x-rays. Such high aspect ratios are challenging to produce by lithography. We are investigating the fabrication of high-aspect-ratio linear zone plates by multilayer deposition followed by sectioning. As an initial step in this work, we present a synchrotron x-ray study of constant-period multilayers diffracting in Laue (transmission) geometry. Data are presented from two samples: a 200 period W/Si multilayer with d-spacing of 29 nm, and a 2020 period Mo/Si multilayer with d-spacing of 7 nm. By cutting and polishing we have successfully produced thin cross sections with section depths ranging from 2 to 12 μm. Transverse scattering profiles (rocking curves) across the Bragg reflection exhibit well-defined interference fringes originating from the depth of the sample, in agreement with dynamical diffraction theory for a multilayer in Laue geometry.

Citation Download Citation

Hyon Chol Kang, Gregory B. Stephenson, Chian Liu, Ray Conley, Albert T. Macrander, Jorg Maser, Sasa Bajt, and Henry N. Chapman "Synchrotron x-ray study of multilayers in Laue geometry", Proc. SPIE 5537, X-Ray Sources and Optics, (3 November 2004); https://doi.org/10.1117/12.560173

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