An assessment of yttrium optical constants EUV using Mo/Y multilayers designed as in the linear polarizers

Benjawan Kjornrattanawanich; Regina Soufli; Sasa Bajt; David L. Windt; John F. Seely

doi:10.1117/12.560465

14 October 2004 An assessment of yttrium optical constants EUV using Mo/Y multilayers designed as in the linear polarizers

Benjawan Kjornrattanawanich, Regina Soufli, Sasa Bajt, David L. Windt, John F. Seely

Author Affiliations +

Proceedings Volume 5538, Optical Constants of Materials for UV to X-Ray Wavelengths; (2004) https://doi.org/10.1117/12.560465
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We have produced and characterized Mo/Y multilayers designed as linear-polarizers for use near λ ~ 8 nm. By depositing these films directly onto silicon photodiodes, we are able to measure both reflectance and transmittance in the EUV using synchrotron radiation. These measurements have been used to access the accuracy of yttrium optical constants in this wavelength range. We describe our experimental results and discuss the prospects for the future development of efficient EUV polarization elements.

Citation Download Citation

Benjawan Kjornrattanawanich, Regina Soufli, Sasa Bajt, David L. Windt, and John F. Seely "An assessment of yttrium optical constants EUV using Mo/Y multilayers designed as in the linear polarizers", Proc. SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths, (14 October 2004); https://doi.org/10.1117/12.560465

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