Laser-induced phase changes of metallic Ti and W thin films

Rodger Evans; Santiago Camacho-Lopez; Raul Rangel-Rojo; M. A. Camacho-Lopez; Celia A. Sanchez-Perez; A. Esparza-Garcia

doi:10.1117/12.591709

21 October 2004 Laser-induced phase changes of metallic Ti and W thin films

Rodger Evans, Santiago Camacho-Lopez, Raul Rangel-Rojo, M. A. Camacho-Lopez, Celia A. Sanchez-Perez, A. Esparza-Garcia

Proceedings Volume 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications; (2004) https://doi.org/10.1117/12.591709
Event: 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, 2004, Porlamar, Venezuela

Abstract

In this work we present experimental findings in the field of laser matter interaction on the topic of laser induced oxidation and crystalline structure change. It has been shown in the past few years that lasers can be used to induce both oxidization of metals as well changes the crystal in the crystalline structure of the metal oxide. Conventional theory has proven to be mildly successful in predicting these effects with a thermal model; drawing its influence from the traditional method of inducing material change by baking the metal. We reformed a scan of varying values of laser intensity and accumulated fluence. We will show evidence of an increase in the oxygen content in Ti and W thin films irradiated by a frequency doubled Nd:YAG laser source with a pulse duration of 4 ns and per pulse energies of 26 to 60 μJ (peak intensities of 1.7 x 10⁷ to 3.8 x 10⁷ W/cm²). We will also show that other effects, that may include crystalline structure change, are also occurring.

Citation Download Citation

Rodger Evans, Santiago Camacho-Lopez, Raul Rangel-Rojo, M. A. Camacho-Lopez, Celia A. Sanchez-Perez, and A. Esparza-Garcia "Laser-induced phase changes of metallic Ti and W thin films", Proc. SPIE 5622, 5th Iberoamerican Meeting on Optics and 8th Latin American Meeting on Optics, Lasers, and Their Applications, (21 October 2004); https://doi.org/10.1117/12.591709

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