Measured X-ray Performance of Synthetic Multilayers Compared To Calculated Effects of Layer Imperfection

James L. Wood; Nicola J. Grupido; Keith L. Hart; Steven A. Flessa; Alan M. Kadin; John E. Keem; David H. Ferris

doi:10.1117/12.949672

6 May 1985 Measured X-ray Performance of Synthetic Multilayers Compared To Calculated Effects of Layer Imperfection

James L. Wood, Nicola J. Grupido, Keith L. Hart, Steven A. Flessa, Alan M. Kadin, John E. Keem, David H. Ferris

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949672
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

In connection with the manufacture of OVONYXTM multilayer x-ray optical elements, investigations have been carried out into the effects of various types of layer imperfections on the x-ray optical properties of multilayers. These have included extensive numerical modeling of real multilayers (using a computational scheme based on the complete dynamical theory) including simulations of interface diffusion, deviations from constant d-spacing, and interface roughness. Results are presented for several examples of Hf-Si and W-Si multilayers, including comparison of measurements at Cu-Kato the theoretical model.

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James L. Wood, Nicola J. Grupido, Keith L. Hart, Steven A. Flessa, Alan M. Kadin, John E. Keem, and David H. Ferris "Measured X-ray Performance of Synthetic Multilayers Compared To Calculated Effects of Layer Imperfection", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949672

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