An instrument for surface roughness measurement of optical thin films

Haihong Hou; Kui Yi; Jianda Shao; Zhengxiu Fan

doi:10.1117/12.572611

10 February 2005 An instrument for surface roughness measurement of optical thin films

Haihong Hou, Kui Yi, Jianda Shao, Zhengxiu Fan

Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.572611
Event: Photonics Asia, 2004, Beijing, China

Abstract

A total integrated scattering (TIS) instrument is presented. Its basic structure, theory foundation, and measurement principle are introduced. The surface root mean square (rms) roughness of single silver films on BK7 glass substrates is measured by employing this instrument. The results agree well with the data obtained by the optical profilometer and the atomic force microscope (AFM).

Citation Download Citation

Haihong Hou, Kui Yi, Jianda Shao, and Zhengxiu Fan "An instrument for surface roughness measurement of optical thin films", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.572611

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