Data-processing method of white-light differential interference based on wavelet transform

Yongjun Nie; Huimin Yan; Yanli Du; Yong Wu; Xiaoqiang Yao; Baixuan Shi

doi:10.1117/12.576113

10 February 2005 Data-processing method of white-light differential interference based on wavelet transform

Yongjun Nie, Huimin Yan, Yanli Du, Yong Wu, Xiaoqiang Yao, Baixuan Shi

Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.576113
Event: Photonics Asia, 2004, Beijing, China

Abstract

A thickness measurement system of ultra-thin metal foils using differential white light interference has been investigated, where a data processing scheme, using wavelet transform has been carried out. The analysis of simulation result indicates that this method has high accuracy and can be applied in the course of actual measurement.

Citation Download Citation

Yongjun Nie, Huimin Yan, Yanli Du, Yong Wu, Xiaoqiang Yao, and Baixuan Shi "Data-processing method of white-light differential interference based on wavelet transform", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.576113

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