SMART SET - An Integrated Approach to Stepper Set-Up and Calibration

Raul V. Tan; Christopher P. Ausschnitt

doi:10.1117/12.949731

2 January 1986 SMART SET - An Integrated Approach to Stepper Set-Up and Calibration

Raul V. Tan, Christopher P. Ausschnitt

Proceedings Volume 0565, Micron and Submicron Integrated Circuit Metrology; (1986) https://doi.org/10.1117/12.949731
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

We report here the development of SMART SET', an expert system designed to complement the GCA DSW Wafer Stepperg, such that closed loop feedback for stepper set-up and calibration is realized. In particular, SMART SET' enables the user to monitor and optimize overlay and utilization performance. Measurements are obtained directly from the automated local alignment and history file systems of the stepper. An analysis package which embodies the expertise of stepper applications engineers provides rapid feedback of the system corrections required to sustain optimum stepper performance.

Citation Download Citation

Raul V. Tan and Christopher P. Ausschnitt "SMART SET - An Integrated Approach to Stepper Set-Up and Calibration", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); https://doi.org/10.1117/12.949731

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