Recent advances in electrostatic microactuators for mirror steering

Carlos H. Mastrangelo

doi:10.1117/12.600087

22 January 2005 Recent advances in electrostatic microactuators for mirror steering

Carlos H. Mastrangelo

Proceedings Volume 5719, MOEMS and Miniaturized Systems V; (2005) https://doi.org/10.1117/12.600087
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

The design and fabrication of electrostatic actuators for micro-mirror systems in telecommunications, scanning, and display applications has advanced enormously over the past few years. These advances were largely stimulated by the telecommunication bubble of the early 2000's. Early micro-mirror systems utilized parallel plate actuation schemes that suffered from inherent pull-in stabilities and required high operation voltages of several hundred Volts. The continuous need for micro-mirror systems that deflect at high angles with low voltage drives (< 50 V) have resulted in a number of solutions. Innovative techniques such as the utilization of parametric analog torque amplification, raised side electrodes that suppress pull-in and magnify torque, high energy density vertical comb drives, and mechanical motion multiplication schemes all contribute toward these goals. This paper reviews recent progress in this area and discusses current technical challenges.

Citation Download Citation

Carlos H. Mastrangelo "Recent advances in electrostatic microactuators for mirror steering", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); https://doi.org/10.1117/12.600087

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