Aluminum-enhanced optical coatings for the VUV spectral range

Minghong Yang; Alexandre Gatto; Norbert Kaiser

doi:10.1117/12.625133

4 October 2005 Aluminum-enhanced optical coatings for the VUV spectral range

Minghong Yang, Alexandre Gatto, Norbert Kaiser

Proceedings Volume 5963, Advances in Optical Thin Films II; 59630M (2005) https://doi.org/10.1117/12.625133
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

This paper deals with the approaches to preserve the high reflectance aluminum mirror for the VUV spectral region. Single fluoride and oxides layer, homogeneous multilayer and hybrid multilayer solutions are put forward. Single fluoride and oxides materials have achieved reflectance above 90% at 193 nm.

Citation Download Citation

Minghong Yang, Alexandre Gatto, and Norbert Kaiser "Aluminum-enhanced optical coatings for the VUV spectral range", Proc. SPIE 5963, Advances in Optical Thin Films II, 59630M (4 October 2005); https://doi.org/10.1117/12.625133

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