Gabor filters in industrial inspection: a review. Application to semiconductor industry

F. Meriaudeau; F. Truchetet; O. Laligant; P. Bourgeat

doi:10.1117/12.637675

7 November 2005 Gabor filters in industrial inspection: a review. Application to semiconductor industry

F. Meriaudeau, F. Truchetet, O. Laligant, P. Bourgeat

Proceedings Volume 6001, Wavelet Applications in Industrial Processing III; 600108 (2005) https://doi.org/10.1117/12.637675
Event: Optics East 2005, 2005, Boston, MA, United States

Abstract

This paper focuses on reviewing some recent works of the use of Gabor filters dealing with industrial applications. After a brief recall of Gabor filter basis, the two usual uses of Gabor filters are recalled: filter bank approach and filter design approach. The third part presents recent published works domain by domain. A fourth part exposes our own work with Gabor Filters for defect detection on semiconductor. A short conclusion summarizes the paper.

Citation Download Citation

F. Meriaudeau, F. Truchetet, O. Laligant, and P. Bourgeat "Gabor filters in industrial inspection: a review. Application to semiconductor industry", Proc. SPIE 6001, Wavelet Applications in Industrial Processing III, 600108 (7 November 2005); https://doi.org/10.1117/12.637675

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