Reliability testing and qualification of the TeraVicta RF MEMS switch

John S. McKillop

doi:10.1117/12.648776

5 January 2006 Reliability testing and qualification of the TeraVicta RF MEMS switch

John S. McKillop

Proceedings Volume 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V; 61110B (2006) https://doi.org/10.1117/12.648776
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

This paper presents the results of work by Teravicta Technologies to adapt semiconductor industry standards and practices to the qualification of RF MEMS switch components. This includes an overview of parametric test data including contact resistance and key RF performance indicators (insertion loss, return loss, and isolation) and reliability test results, identification of key failure modes, the development of failure accelerants and accelerated life test procedures, and final qualification results. Although some tests are unique to the RF MEMS switch, the methodology presented here provides a sound starting point for the development of qualification procedures for other MEMS devices.

Citation Download Citation

John S. McKillop "Reliability testing and qualification of the TeraVicta RF MEMS switch", Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 61110B (5 January 2006); https://doi.org/10.1117/12.648776

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