3D integration of sub-surface photonics with CMOS

Bahram Jalali; Tejaswi Indukuri; Prakash Koonath

doi:10.1117/12.652242

3 March 2006 3D integration of sub-surface photonics with CMOS

Bahram Jalali, Tejaswi Indukuri, Prakash Koonath

Proceedings Volume 6124, Optoelectronic Integrated Circuits VIII; 61240U (2006) https://doi.org/10.1117/12.652242
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

The integration of photonics and electronics on a single silicon substrate requires technologies that can add optical functionalities without significantly sacrificing valuable wafer area. To this end, we have developed an innovative fabrication process, called SIMOX 3-D Sculpting, that enables monolithic optoelectronic integration in a manner that does not compromise the economics of CMOS manufacturing. In this technique, photonic devices are realized in subsurface silicon layers that are separated from the surface silicon layer by an intervening SiO₂ layer. The surface silicon layer may then be utilized for electronic circuitry. SIMOX 3-D sculpting involves (1) the implantation of oxygen ions into a patterned silicon substrate followed by (2) high temperature anneal to create buried waveguide-based photonic devices. This process has produced subterranean microresonators with unloaded quality factors of 8000 and extinction ratios >20dB. On the surface silicon layers, MOS transistor structures have been fabricated. The small cross-sectional area of the waveguides lends itself to the realization of nonlinear optical devices. We have previously demonstrated spectral broadening and continuum generation in silicon waveguides utilizing Kerr optical nonlinearity. This may be combined with microresonator filters for on-chip supercontiuum generation and spectral carving. The monolithic integration of CMOS circuits and optical modulators with such multi-wavelength sources represent an exciting avenue for silicon photonics.

Citation Download Citation

Bahram Jalali, Tejaswi Indukuri, and Prakash Koonath "3D integration of sub-surface photonics with CMOS", Proc. SPIE 6124, Optoelectronic Integrated Circuits VIII, 61240U (3 March 2006); https://doi.org/10.1117/12.652242

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KEYWORDS

Silicon

Waveguides

Resonators

Microresonators

Electronics

Photonics

Integrated optics

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