Paper
7 July 2006 Optical surfacing of reflecting SiC mirrors of 520mm R-C system
Lvjun Yuan, Bin Wang
Author Affiliations +
Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 61493N (2006) https://doi.org/10.1117/12.674359
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China
Abstract
In the area of astronomy and space camera, the application of silicon carbide (SiC) will have a good future for its specific stiffness and quickly thermal diffusion. However, SiC as a new material of optical mirror is difficult to process efficiently because of its specific characteristics such as stiffness and material structure. To manufacture the aspheric SiC mirrors of a R-C system with aperture 520mm in diameter, we starts to research on optical surfacing of SiC. Some small SiC parts are used to do serial surfacing experiments for finding a technology to improve the surface roughness of SiC. Test result shows that the surface roughness (RMS) of the best plate is better than 1.0nm. Finally, the surfacing results of the ellipsoid primary mirror with aperture 520mm in diameter and the hyperboloid secondary mirror with aperture 114mm in diameter of the R-C system are measured. The surface error (RMS) of them is less than 15nm, and the surface roughness of them is better than 1.8nm. The results meet the requirements of optical mirrors.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lvjun Yuan and Bin Wang "Optical surfacing of reflecting SiC mirrors of 520mm R-C system", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61493N (7 July 2006); https://doi.org/10.1117/12.674359
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KEYWORDS
Mirrors

Silicon carbide

Surface roughness

Polishing

Optics manufacturing

Abrasives

Surface finishing

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