Metrology tool fleet management: a comprehensive discussion of requirements and solutions

Eric Solecky

doi:10.1117/12.659589

24 March 2006 Metrology tool fleet management: a comprehensive discussion of requirements and solutions

Eric Solecky

Proceedings Volume 6152, Metrology, Inspection, and Process Control for Microlithography XX; 61520U (2006) https://doi.org/10.1117/12.659589
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Managing a fleet of metrology tools is becoming an extremely daunting task. This is especially so in manufacturing lines where it is not unusual to have many tools in the fleet and a very large mix of product and technologies. It is this large mix of product and technologies which pushes the number of recipes created into the thousands. Combine the large number of recipes with a poorly calibrated, monitoring and managed fleet of tools and productivity can be negatively impacted many ways. In this paper, these productivity detractors are explained in more detail to help understand the numerous ways a fleet of metrology tools can negatively impact the productivity of the manufacturing and development lines. In the pursuit of reducing metrology tool induced productivity detractors, the concept of metrology tool fleet management is presented. Categories of fleet management are also introduced along with a comprehensive discussion of requirements. It is hoped that this discussion of requirements and solutions concerning the metrology tool fleet management concept will launch efforts in coordinating the comprehensive solutions needed between suppliers and tool owners. Some recommendations are made regarding long term solutions to needs with respect to integrating fleet management into manufacturing fab systems.

Citation Download Citation

Eric Solecky "Metrology tool fleet management: a comprehensive discussion of requirements and solutions", Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 61520U (24 March 2006); https://doi.org/10.1117/12.659589

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