Total internal reflection ellipsometry of periodic structures

Jaromír Pištora; Jaroslav Vlček; Petr Hlubina; Martin Foldyna; Ondřej Životský

doi:10.1117/12.675733

18 April 2006 Total internal reflection ellipsometry of periodic structures

Jaromír Pištora, Jaroslav Vlček, Petr Hlubina, Martin Foldyna, Ondřej Životský

Proceedings Volume 6180, Photonics, Devices, and Systems III; 61801E (2006) https://doi.org/10.1117/12.675733
Event: Photonics, Devices, and Systems III, 2005, Prague, Czech Republic

Abstract

The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating.

Citation Download Citation

Jaromír Pištora, Jaroslav Vlček, Petr Hlubina, Martin Foldyna, and Ondřej Životský "Total internal reflection ellipsometry of periodic structures", Proc. SPIE 6180, Photonics, Devices, and Systems III, 61801E (18 April 2006); https://doi.org/10.1117/12.675733

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