Paper
13 June 2006 The joint astrophysical plasmadynamic experiment (J-PEX) high-resolution EUV spectrometer: diffraction grating efficiency
M. P. Kowalski, F. B. Berendse, T. W. Barbee Jr., W. R. Hunter, K. F. Heidemann, R. Lenke, A. Seifert, R. G. Cruddace
Author Affiliations +
Abstract
We have fabricated five new holographic ion-etched polymer-coated gratings for a reflight on a sounding rocket of the J-PEX high-resolution EUV spectrometer. The gratings are parabolic (nominal 2000-mm focal length), large (160 mm x 90 mm), and have a blazed groove profile of high density (3600 grooves/mm at the vertex). They have been coated with a high-reflectance multilayer of Mo/Si/C. Using an atomic force microscope, we examined grating topography before multilayer coating. The surface roughness is 2 angstrom rms and the blaze angle is near the target value of 2.4°. Using synchrotron radiation, we completed an efficiency calibration map of each multilayer-coated grating over the wavelength range 220-245 angstrom. At an angle of incidence of 5°, the average efficiency in the first inside order peaks near 234 angstrom. The average peak efficiency is 12.3 ± 1.0% for Grating 1, 12.6 ± 2.4% for Grating 2, 12.6 ± 1.8% for Grating 3, 14.1 ± 3.0% for Grating 4, and 13.0 ± 1.0% for Grating 5. The derived groove efficiency averaged over all gratings is approximately 50%, which meets our goals. Refined models of the multilayer gratings are required to resolve remaining issues.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. P. Kowalski, F. B. Berendse, T. W. Barbee Jr., W. R. Hunter, K. F. Heidemann, R. Lenke, A. Seifert, and R. G. Cruddace "The joint astrophysical plasmadynamic experiment (J-PEX) high-resolution EUV spectrometer: diffraction grating efficiency", Proc. SPIE 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray, 62660W (13 June 2006); https://doi.org/10.1117/12.670351
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Cited by 5 scholarly publications.
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KEYWORDS
Multilayers

Reflectivity

Diffraction gratings

Atomic force microscopy

Extreme ultraviolet

Spectroscopy

Sensors

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