A low-noise durable transmissive stamper for multi-layer discs using phase transition mastering

Yukari Aoki; Kuniyuki Morita; Kyosuke Deguchi; Toshimori Miyakoshi; Yasuyuki Miyaoka; Tomoyuki Hiroki; Osamu Koyama

doi:10.1117/12.692308

22 June 2006 A low-noise durable transmissive stamper for multi-layer discs using phase transition mastering

Yukari Aoki, Kuniyuki Morita, Kyosuke Deguchi, Toshimori Miyakoshi, Yasuyuki Miyaoka, Tomoyuki Hiroki, Osamu Koyama

Proceedings Volume 6282, Optical Data Storage 2006; 62821L (2006) https://doi.org/10.1117/12.692308
Event: Optical Data Storage 2006, 2006, Montréal, Canada

Abstract

We developed a negative-type photoresist of WOx film and obtained a low noise groove. We also confirmed a feasibility of the transmissive stamper using the WOx film for multi-layer discs.

Citation Download Citation

Yukari Aoki, Kuniyuki Morita, Kyosuke Deguchi, Toshimori Miyakoshi, Yasuyuki Miyaoka, Tomoyuki Hiroki, and Osamu Koyama "A low-noise durable transmissive stamper for multi-layer discs using phase transition mastering", Proc. SPIE 6282, Optical Data Storage 2006, 62821L (22 June 2006); https://doi.org/10.1117/12.692308

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