Experimental study of disharge characteristics and fluorine atom yield on DC discharge of NF<sub>3</sub>/He

Liping Duo; Shukai Tang; Haijun Yu; Jian Wang; Liucheng Li; Yuqi Jin; Bailing Yang; Fengting Sang

doi:10.1117/12.739116

26 April 2007 Experimental study of disharge characteristics and fluorine atom yield on DC discharge of NF₃/He

Liping Duo, Shukai Tang, Haijun Yu, Jian Wang, Liucheng Li, Yuqi Jin, Bailing Yang, Fengting Sang

Proceedings Volume 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; 63462S (2007) https://doi.org/10.1117/12.739116
Event: XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2006, Gmunden, Austria

Abstract

DC discharge characteristics of NF3/He have investigated experimentally at many kinds of experimental conditions, for example, different electrodes material, a few of distance between the two electrodes, flow rates of the gas NF₃ or He, a series of series-wound resistances and give the steady and optimum discharge parameters finally. Fluorine atom yield from the DC discharge of NF3/He have studied experimentally and the relationship of fluorine atom yield and the load power is shown for the first time.

Citation Download Citation

Liping Duo, Shukai Tang, Haijun Yu, Jian Wang, Liucheng Li, Yuqi Jin, Bailing Yang, and Fengting Sang "Experimental study of disharge characteristics and fluorine atom yield on DC discharge of NF₃/He", Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63462S (26 April 2007); https://doi.org/10.1117/12.739116

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