Silicon nanophotonics using deep-UV lithography

P. Bienstman; F. Van Laere; D. Taillaert; P. Dumon; W. Bogaerts; K. De Vos; D. Van Thourhout; R. Baets

doi:10.1117/12.690594

4 October 2006 Silicon nanophotonics using deep-UV lithography

P. Bienstman, F. Van Laere, D. Taillaert, P. Dumon, W. Bogaerts, K. De Vos, D. Van Thourhout, R. Baets

Proceedings Volume 6351, Passive Components and Fiber-based Devices III; 63512M (2006) https://doi.org/10.1117/12.690594
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea

Abstract

We will present recent progress in several devices based on silicon-on-insulator nanophotonics using deep-UV lithography. We will report on high efficiency grating couplers, ultra-compact arrayed waveguide gratings and ring-resonator based biosensors.

Citation Download Citation

P. Bienstman, F. Van Laere, D. Taillaert, P. Dumon, W. Bogaerts, K. De Vos, D. Van Thourhout, and R. Baets "Silicon nanophotonics using deep-UV lithography", Proc. SPIE 6351, Passive Components and Fiber-based Devices III, 63512M (4 October 2006); https://doi.org/10.1117/12.690594

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