Paper
13 October 2006 Assembly of micro-optical systems with mechanical positioning
Author Affiliations +
Proceedings Volume 6376, Optomechatronic Micro/Nano Devices and Components II; 637609 (2006) https://doi.org/10.1117/12.687208
Event: Optics East 2006, 2006, Boston, Massachusetts, United States
Abstract
Aligning of multiple micro-optical components is required for many systems composed of arrays of multiple lens elements, apertures, and filters. Methods of aligning two such wafers using mechanical features are discussed here. Alignment features include binary holes and posts, or grooves and ridges. With the circular holes or rectangular grooves etched into the two wafers, the mating pins or ridges are formed on both sides of a separate element to set both the lateral and vertical positioning. Grayscale technology allows for the printing of V-grooves and V-cones onto any substrate material over a wide range of aspect ratios. When integrated with cylindrical (fiber) or spherical (ball lens) mechanical features, this allows for accurate positioning. Some techniques allow for repositioning as well as disassembly and reassembly. The designs are kinematic or nearly kinematic. The paper discusses tolerances on mating components, and the associated precision of the overall alignment.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew Stockham, Jay A. Hammer, John G. Smith, and Luis M. Nelson "Assembly of micro-optical systems with mechanical positioning", Proc. SPIE 6376, Optomechatronic Micro/Nano Devices and Components II, 637609 (13 October 2006); https://doi.org/10.1117/12.687208
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CITATIONS
Cited by 7 patents.
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KEYWORDS
Semiconducting wafers

Optical alignment

Microscopes

Binary data

Etching

Photography

Photomasks

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