Paper
13 October 1986 Non-Optical Characterization Techniques For Optical Coatings
Karl H Guenther
Author Affiliations +
Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938382
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria
Abstract
In the various phases of the development, production, and use of optical thin film coatings, it is vital to choose proper materials not only with respect to their optical properties but just as essential with respect to their environmental durability. If envi-ronmental tests reveal failures in optical coatings, this may be due to interactions between the layers and/or between the substrate and the first layer. Such interactions can be established and analyzed by depth profiling using electron- and/or ion-beam methods. Empha-sis must be placed on the practicability of these analysis methods with dielectric coatings where difficulties may sometimes arise because of decomposition, diffusion or intermixing, and charging effects during analysis.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Karl H Guenther "Non-Optical Characterization Techniques For Optical Coatings", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938382
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KEYWORDS
Ions

Thin films

Electrons

Optical coatings

Profiling

Dielectrics

Chemical analysis

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