Theoretical and experimental investigations of non-goniometric scatterometry

Cornelius Hahlweg; Hendrik Rothe

doi:10.1117/12.767684

10 September 2007 Theoretical and experimental investigations of non-goniometric scatterometry

Cornelius Hahlweg, Hendrik Rothe

Proceedings Volume 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III; 66720K (2007) https://doi.org/10.1117/12.767684
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

For angular resolved scatterometrical applications - besides the mechanical goniometer solutions - a lot of purely optical approaches are known. The paper first gives an overview on about 15 years of research in the field of non-goniometrical scatterometry at the Chair for Measurement and Information Technology at the University of the Federal Armed Forces in Hamburg with focus set on industrially applicable fast and rugged devices, allowing angular resolved measurements. In the technical part some aspects on the feature extraction problem in relation to the scatter mechanism of rough surfaces will be discussed. Further on the imaging properties of catadioptrical systems with elliptical and spherical mirrors will be treated in an engineer friendly way, concluding in easy-to-handle design rules and concepts.

Citation Download Citation

Cornelius Hahlweg and Hendrik Rothe "Theoretical and experimental investigations of non-goniometric scatterometry", Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720K (10 September 2007); https://doi.org/10.1117/12.767684

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