High efficiency arrangement in comb-drive actuators

Xing Chen; Dong Weon Lee; Jun Ding

doi:10.1117/12.782684

19 November 2007 High efficiency arrangement in comb-drive actuators

Xing Chen, Dong Weon Lee, Jun Ding

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67240Q (2007) https://doi.org/10.1117/12.782684
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

This paper presents a new comb-drive actuator arrangement that has a large displacement with low driving voltage and relatively small footprint. The new arrangements in the comb drivers can provide both pulling forces and pushing forces as compared to conventional drivers that only provide pulling forces, therefore additional displacements are achieved without increasing the driving voltage. This arrangement is verified numerically using FEM and the simulation results are consistent with the values derived from the mathematical model. The results show an obviously enhanced displacement and a compact layout.

Citation Download Citation

Xing Chen, Dong Weon Lee, and Jun Ding "High efficiency arrangement in comb-drive actuators", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67240Q (19 November 2007); https://doi.org/10.1117/12.782684

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available