Study of magnetic nanostructures fabricated using laser interference lithography

Zijun Zhang; Yuxian Guo; Youmei Chen; Yin Liu; Xiangdong Xu; Shaojun Fu D.V.M.; Jie Wang; Pengshou Xu

doi:10.1117/12.782895

21 November 2007 Study of magnetic nanostructures fabricated using laser interference lithography

Zijun Zhang, Yuxian Guo, Youmei Chen, Yin Liu, Xiangdong Xu, Shaojun Fu D.V.M., Jie Wang, Pengshou Xu

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67241J (2007) https://doi.org/10.1117/12.782895
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Magnetic submicron meter structures were fabricated on Co_0.9Fe_0.1 films by laser interference lithography combined with ion beam etching. The vertical standing wave was restrained by using proper exposure dose and appropriate development time. Hysteresis loops of the magnetic film and magnetic patterns were presented by surface magneto-optical Kerr effect. The difference magnetism between magnetic patterns with different critical sizes and the film was discussed.

Citation Download Citation

Zijun Zhang, Yuxian Guo, Youmei Chen, Yin Liu, Xiangdong Xu, Shaojun Fu D.V.M., Jie Wang, and Pengshou Xu "Study of magnetic nanostructures fabricated using laser interference lithography", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241J (21 November 2007); https://doi.org/10.1117/12.782895

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