Evolution Of Surface Roughness And Scatter In Evaporated Zirconia/Silica Multilayer Coatings

R E Klinger; P Swab

doi:10.1117/12.939537

23 December 1986 Evolution Of Surface Roughness And Scatter In Evaporated Zirconia/Silica Multilayer Coatings

R E Klinger, P Swab

Proceedings Volume 0678, Optical Thin Films II: New Developments; (1986) https://doi.org/10.1117/12.939537
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Problems of light scattering in multilayer dielectric thin films arise from non-uniform variations in optical indices. The purpose of this work was to evaluate the surface roughness and interfaces in zirconia/silica multilayers with respect to scattering. Scatter and surface roughness were evaluated with angular resolved scatterometry (at 633 nm) and stylus profilometry. The multilayer thin film interfaces and growth morphologies were characterized with transmission electron microscopy using thin cross sections prepared by ultra-microtomy. Multilayer designs made of thick zirconia layers showed both a higher scattered intensity and scattering at higher angles than those designs composed of thinner zirconia layers. Stylus profilometry data agreed with this trend, indicating that surface roughness is determined more by the zirconia layer thickness than by the number of layers. Transmission electron microscopy (TEM) provided an explanation for this behavior. Zirconia was observed to nucleate and form a vertical columnar microstructure on silica from which evolved a coarse, dendritic growth morphology. The silica, on the other hand, seemed to moderate the contribution of the zirconia microstructure to the multilayer surface texture.

Citation Download Citation

R E Klinger and P Swab "Evolution Of Surface Roughness And Scatter In Evaporated Zirconia/Silica Multilayer Coatings", Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); https://doi.org/10.1117/12.939537

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available