Design of pattern-specific mask grating for giving the effect of an off-axis illumination

Young-Seok Kim; Seok Ho Song; Jong Ung Lee; Sung Hyun Oh; Yong Kyoo Choi; Munsik Kim; Beom-Hoan O; Se-Geun Park; El-Hang Lee; Seung Gol Lee

doi:10.1117/12.798809

2 May 2008 Design of pattern-specific mask grating for giving the effect of an off-axis illumination

Young-Seok Kim, Seok Ho Song, Jong Ung Lee, Sung Hyun Oh, Yong Kyoo Choi, Munsik Kim, Beom-Hoan O, Se-Geun Park, El-Hang Lee, Seung Gol Lee

Author Affiliations +

Proceedings Volume 6792, 24th European Mask and Lithography Conference; 67920R (2008) https://doi.org/10.1117/12.798809
Event: 24th European Mask and Lithography Conference, 2008, Dresden, Germany

Abstract

In order to realize the effect of pattern-specific off-axis illumination under the conventional circular illumination, the illumination method using a mask grating formed on the top side of a photo mask was evaluated and improved. Contrary to an off-axis illumination, it could provide the locally different off-axis illumination depending on the pattern shape defined on the bottom side of a mask. The structure of the mask grating was determined from the feature characteristics of the mask pattern and its performance was evaluated with the simulated Bossung curves.

Citation Download Citation

Young-Seok Kim, Seok Ho Song, Jong Ung Lee, Sung Hyun Oh, Yong Kyoo Choi, Munsik Kim, Beom-Hoan O, Se-Geun Park, El-Hang Lee, and Seung Gol Lee "Design of pattern-specific mask grating for giving the effect of an off-axis illumination", Proc. SPIE 6792, 24th European Mask and Lithography Conference, 67920R (2 May 2008); https://doi.org/10.1117/12.798809

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available