Fundamental microstructures fabricated on FOTURAN glass using femtosecond laser

Yinzhong Wu; Ching-yue Wang; Wei Jia; Minglie Hu; Xiaochang Ni; Lu Chai

doi:10.1117/12.755083

4 January 2008 Fundamental microstructures fabricated on FOTURAN glass using femtosecond laser

Yinzhong Wu, Ching-yue Wang, Wei Jia, Minglie Hu, Xiaochang Ni, Lu Chai

Proceedings Volume 6825, Lasers in Material Processing and Manufacturing III; 68250I (2008) https://doi.org/10.1117/12.755083
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Femtosecond laser with 775nm wavelength and 150fs pulse width was empoyed to fabricate microstructures on a photosensitive glass (FOTURAN). The fabrication procedures included three steps: focused irradiation of femtosecond laser, programmed heat treatment and wet chemical etching in 8% ultrasonic solution of hydrofluoric acid for 50 minutes. By adopting appropriate incident laser parameters, including average power, numbers of pulses and scanning velocity, several fundamental microstructures had been fabricated on FOTURAN. The morphologies of these microstructures were analyzed by optical microscope, atomic force microscope and scanning electron microscope. Concave dots with smooth wall and several tens of microns in diameter are obtained on the surface. Microholes with circular cross-section and several tens microns in diameter are fabricated by femtosecond laser longitudinal writing mode, and currently the aspect ratio value above 8 is achieved. Femtosecond laser-induced index-refractive-change structures and shallow grooves are fabricated on the surface by transverse writing mode. The influences of incident laser parameters on final fabrication results are also experimentally characterized.

Citation Download Citation

Yinzhong Wu, Ching-yue Wang, Wei Jia, Minglie Hu, Xiaochang Ni, and Lu Chai "Fundamental microstructures fabricated on FOTURAN glass using femtosecond laser", Proc. SPIE 6825, Lasers in Material Processing and Manufacturing III, 68250I (4 January 2008); https://doi.org/10.1117/12.755083

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