Femtosecond laser micromachining and microfabrication in transparent materials

Yan Li; Dayong Liu; Fengjie Qi; Hong Yang; Qihuang Gong

doi:10.1117/12.756355

1 February 2008 Femtosecond laser micromachining and microfabrication in transparent materials

Yan Li, Dayong Liu, Fengjie Qi, Hong Yang, Qihuang Gong

Proceedings Volume 6825, Lasers in Material Processing and Manufacturing III; 68250K (2008) https://doi.org/10.1117/12.756355
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

We have realized three-dimensional micromachining and microfabrication in transparent materials with femtosecond laser pulses, including water-assisted drilling by ablation, hologram encoding by microexplosion, waveguide writing by refractive index increase, and nanoline and nanotip polymerization via two-photon absorption. With the water-assisted drilling, we showed that not only longitudinal holes in the laser beam propagation direction but also transverse holes perpendicular to laser beam could be drilled when the sample's rear surface was in contact with water. True three-dimensional microchannels and microchambers were fabricated. In addition, three-dimensional cutting of glass was realized with the water assistance. By using tightly focused pulse to induce microexplosion, permanent computer-generated holograms were directly written inside glass and the stored data were reconstructed by a He-Ne laser beam. A waveguide array was written inside glass by the laser induced refractive index increase, and coupling between these waveguides was observed. Nanoline and nanotips with sub-30nm feature-size were fabricated using resin SCR500 by two-photon photopolymerization.

Citation Download Citation

Yan Li, Dayong Liu, Fengjie Qi, Hong Yang, and Qihuang Gong "Femtosecond laser micromachining and microfabrication in transparent materials", Proc. SPIE 6825, Lasers in Material Processing and Manufacturing III, 68250K (1 February 2008); https://doi.org/10.1117/12.756355

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available