Selective deposition of conductive copper films on glass surfaces using femtosecond laser surface modification and electroless plating

Jian Xu; Yang Liao; Huidan Zeng; Zenghui Zhou; Haiyi Sun; Juan Song; Xinshun Wang; Ya Cheng; Zhizhan Xu; Koji Sugioka; Katsumi Midorikawa

doi:10.1117/12.754877

4 January 2008 Selective deposition of conductive copper films on glass surfaces using femtosecond laser surface modification and electroless plating

Jian Xu, Yang Liao, Huidan Zeng, Zenghui Zhou, Haiyi Sun, Juan Song, Xinshun Wang, Ya Cheng, Zhizhan Xu, Koji Sugioka, Katsumi Midorikawa

Author Affiliations +

Proceedings Volume 6825, Lasers in Material Processing and Manufacturing III; 68250L (2008) https://doi.org/10.1117/12.754877
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

In this paper, selective deposition of conductive copper films on glass surfaces is demonstrated with the assistance of femtosecond laser surface modification followed by electroless plating. Irradiation of femtosecond laser makes it possible to selectively deposit copper films in the irradiated area on glass surfaces coated with silver nitrate films. The influence of the laser direct writing parameters and the electroless plating process on the formation of copper films is discussed. Meanwhile, the electric properties of copper films are investigated, which confirms that copper films are conductive. A tentative mechanism of the selective deposition process is also proposed. In addition, the potential application of this technique for integrating electrical and thermal functions into microdevices is discussed.

Citation Download Citation

Jian Xu, Yang Liao, Huidan Zeng, Zenghui Zhou, Haiyi Sun, Juan Song, Xinshun Wang, Ya Cheng, Zhizhan Xu, Koji Sugioka, and Katsumi Midorikawa "Selective deposition of conductive copper films on glass surfaces using femtosecond laser surface modification and electroless plating", Proc. SPIE 6825, Lasers in Material Processing and Manufacturing III, 68250L (4 January 2008); https://doi.org/10.1117/12.754877

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