X-Ray Photoelectron Spectroscopy (XPS) Applications Using Microfocused X-Rays

Robert Chaney; Robert Cormia; Ruth Siordia

doi:10.1117/12.936604

12 August 1986 X-Ray Photoelectron Spectroscopy (XPS) Applications Using Microfocused X-Rays

Robert Chaney, Robert Cormia, Ruth Siordia

Proceedings Volume 0690, X-Rays in Materials Analysis: Novel Applications and Recent Developments; (1986) https://doi.org/10.1117/12.936604
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

A focusing quartz crystal monochromator system. has been developed that provides a bright X-ray spot at 1486.6ev. The X-ray spot size may he varied from one-hundred fifty (150) to one-thousand (1000) microns in four (4) steps. The X-ray system is combined with a high. performance electron lens that collects greater than five (5) percent of the photoemitted electrons and passes them into a hemispherical capacitor energy analyzer. The electrons are detected at the exit plane with a two (2) dimensional position sensitivity detector. Using this system, XPS has been carried out on a wide variety of practical samples. We will provide a brief review of the system, design followed by examples of the solution to unique problems. Samples which have been CLosen for discussion include: Crash Zone on a Winchester Disk An interocular Lens . Single 5 micron Carbon. Fiber Plasma Modified Polymeric Say The unique benefits of a focused. source with high energy resolution will also be discussed.

Citation Download Citation

Robert Chaney, Robert Cormia, and Ruth Siordia "X-Ray Photoelectron Spectroscopy (XPS) Applications Using Microfocused X-Rays", Proc. SPIE 0690, X-Rays in Materials Analysis: Novel Applications and Recent Developments, (12 August 1986); https://doi.org/10.1117/12.936604

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available