Defect reduction using new digital valve dispensing technology

Garrett Standley; John Kasson; Brian Kidd

doi:10.1117/12.768951

26 March 2008 Defect reduction using new digital valve dispensing technology

Garrett Standley, John Kasson, Brian Kidd

Proceedings Volume 6923, Advances in Resist Materials and Processing Technology XXV; 69233T (2008) https://doi.org/10.1117/12.768951
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

Defectivity requirements are constantly put to new standards, even in older factories where new toolsets aren't a feasible alternative. To prolong the life of this equipment, Integrated Designs has created the digital dispense valve system. Tracks with older pump systems are plagued with repeatability and suckback issues that are key factors in eliminating or reducing defectivity. The digital dispense system not only increases the pump's capability to hold suckback across significant amounts of idle time regardless of viscosity, but also allows for lower dispense volumes due to more repeatable dispenses. Combining these factors results in a significant decrease in defectivity with only minor equipment additions, that previously would have required costly pump and track upgrades.

Citation Download Citation

Garrett Standley, John Kasson, and Brian Kidd "Defect reduction using new digital valve dispensing technology", Proc. SPIE 6923, Advances in Resist Materials and Processing Technology XXV, 69233T (26 March 2008); https://doi.org/10.1117/12.768951

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